HDI ELIC Roadmap
| # | Time Frame | 2019 | 2020 | 2021 | |
|---|---|---|---|---|---|
| Production | Sample | ||||
| 1 | Ball Pitch | 350 (low I/O) | 350 (hight I/O) | 300 | 250 |
| 2 | Line / Space / Microvia - mSAP | 30 / 30 / 70 | 25 / 25 / 70 | 20 / 20 / 60 | 20 / 20 / 60 |
| 3 | Line / Space / Microvia - Substractive | 35 / 35 / 70 | 35 / 35 / 70 | 30 / 30 / 60 | 30 / 30 / 60 |
| 4 | SM Alignment / Web | ±25 / 65 | ±25 / 65 | ±20 / 60 | ±18 / 55 |
| 5 | Low DK | 3 | 3 | 2.8 | 2.8 |
| 6 | Thin dielectric | 30 | 30 | 25 | 25 |
